Studies on Sputter-Deposited Cu Nanocluster Embedded ZnO Thin Films

Abstract

We reported optical, magnetic, mechanical, structural and surface properties of sandwich structure of ZnO thin films with Cu as mid layer. ZnO was grown by RF sputtering and Cu was grown by DC magnetron sputtering technique. Deposition time of both the films were varied to study the evolution of its properties. The optical, mechanical, structural, surface and magnetic properties of the films were characterized by using UV-Vis Spectroscopy, Vicker hardness test, X-ray Diffraction (XRD), Scanning Electron Microscope (SEM) and Vibrating Sample Magnetometer (VSM) respectively. Transmittance of as deposited decreases and after annealing transmittance increases due to presence of copper nanocluster reported by UV, increase in hardness of the film was reported by vicker hardness test, shifting of peaks due to compressive strain was reported by XRD, presence of nanoparticles and uniform film deposition was reported by SEM and diamagnetic phase was reported by VSM.