Synthesis of Zirconium Oxide Thin Films by using Langmuir-Blodgett Technique

Abstract

Zirconium Oxide thin films were prepared on glass substrate by Langmuir-Blodgett (LB) Deposition Technique. ZrO_2 thin film have very wide range of applications such as for photonics materials, antireflection material, resistive oxygen gas sensors, as a gate dielectric and high temperature fuel cells. We have used the deposition of metal stearate monolayers followed by their oxidation as a method for the synthesis of zirconium oxide thin films. The zirconyl stearate films have been studied and deposited for first time as to the best of our knowledge. These LB films deposited on hydrophilic substrate are z-type in nature. The composition of mixed Langmuir films of metal stearate and stearic acid is determined by its pH. The 200 layer deposition at 20 ^0C is followed by proper heating protocol to ensure complete removal of the stearic acid and/or any other carbon impurity. The resulting films of ~100nm thickness show pure monoclinic phase. The films have a band gap ~ 6.0eV with a strong PL emission peak is at 490nm and a weak peak is at 423nm. So the films formed by LB deposition methods are suitable for luminescent applications.